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To develop a small high-performance microphone with outstanding reliability, we have been
studying silicon microphones. This paper describes the silicon microphone, its broadcasting
applications, and research and development directed toward its consumer electronics
application. The microphone element (the sound-sensing part of a microphone) is formed of
monocrystalline silicon, which is a physically stable and mechanically tough material, through
the use of a novel semiconductor technology we have developed. This technology enables us
to fabricate a silicon microphone that has both superior acoustic characteristics and
outstanding reliability. The prototype broadcasting silicon microphone was used for program
production and picked up sound in harsh conditions that would degrade the performance of
conventional microphones, e.g., hot and humid or acidic conditions. To develop a silicon
microphone for consumer use, we must lower the operating voltage and reduce the size of the
present microphone. To achieve low-voltage operation, we are improving the fabrication
process to form a thinner diaphragm, which receives the sound pressure. We are also
developing a small microphone module to house the microphone element and sensing circuit.
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